Evactron® Combiclean cleaning chamber with remote plasma source
The Evactron CombiClean features an integrated vacuum chamber for desktop cleaning of SEM samples and TEM sample holders. Remote Evactron in–situ cleaning of E-beam instruments such as SEMs and FIBs can be accomplished with an optional second Plasma Radical Source (PRS). The Evactron PRS hollow cathode design uses energy efficient capacitively coupled plasma rather than inductively coupled plasma to avoid energy loss through heat generation. The Evactron CombiClean System is equipped with two cleaning ports for TEM sample holders and a top-loading chamber for SEM samples. The central location of the cleaning ports allows for simultaneous and uniform cleaning of both TEM holders. The Evactron CombiClean chamber features the patented Safar TEM side loaders with a side-entry slot and locking mechanism. The loaders prevent any unwanted contact between the sample holder and the adapter during insertion and removal of the TEM holder. The Safar TEM side loaders are compatible with all TEM manufacturer’s sample rods. The Evactron CombiClean System has an adjustable sample platform, allowing several samples to be cleaned simultaneously. It can also be used as an inert storage location for samples, specimens, and sample mounts with a nitrogen purge feature to re-move outgassing contaminants.