Evactron® Easy Plasma SoftClean (EPSC)


The ultimate in flexibility, the Evactron® Easy Plasma SoftClean (EPSC) combines the Evactron® EP remote Plasma De-Contaminator with the Evactron® SoftClean chamber, creating an easy to use chamber and desktop plasma cleaner. It can also be used as a specimen storage system, keeping samples in a contamination-free environment. The EPSC system is equipped with three cleaning ports for TEM specimen rods and a top-loading lid for SEM samples. The central location of the cleaning ports allows for simultaneous and uniform cleaning of all TEM rods. Optional, patented Safar TEM side loaders (Patent US 8,716,676 B2) feature a side-entry slot and locking mechanism which prevents any unwanted contact between the sample rods and the chamber stage during insertion and removal of the TEM rods. The Evactron EP plasma cleaner can quickly be removed from the SoftClean chamber and mounted on most SEMs for chamber cleaning, making it a uniquely versatile product. The EP plasma creates reactive oxygen radicals using room air as a source gas and efficiently removes hydrocarbon contamination from sample mounts, holders, and chamber surfaces.

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Evactron by XEI Scientific

1755 E Bayshore Rd.
Suite 17A


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Phone: 650-369-0133

Fax: 650-363-1659

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XEI Scientific, Inc.

Phone: +1 650-369-0133

Fax: +1 650-363-1659

Website: http://www.evactron.com